• 文献检索
  • 文档翻译
  • 深度研究
  • 学术资讯
  • Suppr Zotero 插件Zotero 插件
  • 邀请有礼
  • 套餐&价格
  • 历史记录
应用&插件
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
定价
高级版会员购买积分包购买API积分包
服务
文献检索文档翻译深度研究API 文档MCP 服务
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利:CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2026

文献检索

告别复杂PubMed语法,用中文像聊天一样搜索,搜遍4000万医学文献。AI智能推荐,让科研检索更轻松。

立即免费搜索

文件翻译

保留排版,准确专业,支持PDF/Word/PPT等文件格式,支持 12+语言互译。

免费翻译文档

深度研究

AI帮你快速写综述,25分钟生成高质量综述,智能提取关键信息,辅助科研写作。

立即免费体验

非晶硅薄膜场效应晶体管的辐射损伤

Radiation damage of amorphous silicon, thin-film, field-effect transistors.

作者信息

Boudry J M, Antonuk L E

机构信息

Department of Radiation Oncology, University of Michigan, Ann Arbor 48109-0010, USA.

出版信息

Med Phys. 1996 May;23(5):743-54. doi: 10.1118/1.597668.

DOI:10.1118/1.597668
PMID:8724748
Abstract

The effect of 60Co radiation on the noise and drain-source current characteristics of hydrogenated amorphous silicon (alpha-Si:H) field-effect transistors (FETs) was examined as a function of dose to cumulative doses as high as approximately 2 x 10(4) Gy. Following these measurements, room-temperature and elevated-temperature annealing of induced radiation damage was examined. The FETs examined are representative of those incorporated in alpha-Si:H arrays under development for various x-ray medical imaging applications. No significant effect upon the noise characteristics of the FETs was observed as a result of the radiation. The predominant drain-source current effect with increasing dose was a shift of the transfer characteristic toward negative gate voltage and/or a decrease of the transfer characteristic subthreshold slope. This resulted in large increases in leakage current for gate voltages where the FETs were initially highly nonconducting. This leakage current increase was less pronounced for more negative gate voltages and was further diminished by maintaining the FETs at a more negative gate voltage during the irradiation. Following the radiation measurements, room-temperature annealing resulted in a 10% to 50% reduction in the leakage current in the first day followed by a logarithmic decrease thereafter. Elevated-temperature annealing for 2 h at 200 degrees C restored FET leakage current and threshold voltage properties to their preirradiation values. The irradiation effects are small for cumulative doses less than approximately 100 Gy, which is larger than the clinical lifetime dose for an imaging detector for chest radiography or for fluoroscopy (with infrequent exposure to the direct beam). For significantly higher dose applications such as mammography, fluoroscopy (with frequent direct beam exposure), and radiotherapy imaging, the results suggest that periodic elevated-temperature annealing or operation of the arrays at more negative gate voltages may be necessary.

摘要

研究了60Co辐射对氢化非晶硅(α-Si:H)场效应晶体管(FET)的噪声和漏源电流特性的影响,该影响是累积剂量高达约2×10⁴Gy的剂量函数。在这些测量之后,研究了诱导辐射损伤的室温及高温退火情况。所研究的FET代表了正在开发的用于各种X射线医学成像应用的α-Si:H阵列中所包含的FET。未观察到辐射对FET的噪声特性有显著影响。随着剂量增加,漏源电流的主要影响是转移特性向负栅极电压偏移和/或转移特性亚阈值斜率减小。这导致在FET最初高度不导电的栅极电压下漏电流大幅增加。对于更负的栅极电压,这种漏电流增加不太明显,并且通过在辐照期间将FET保持在更负的栅极电压下,漏电流进一步减小。在辐射测量之后,室温退火在第一天使漏电流降低10%至50%,此后呈对数下降。在200℃下进行2小时的高温退火可将FET的漏电流和阈值电压特性恢复到辐照前的值。对于累积剂量小于约100Gy的情况,辐射效应较小,该剂量大于胸部X线摄影或荧光透视成像探测器的临床使用寿命剂量(直接光束照射不频繁)。对于乳腺摄影、荧光透视(直接光束照射频繁)和放射治疗成像等更高剂量应用,结果表明可能需要定期进行高温退火或使阵列在更负的栅极电压下工作。

相似文献

1
Radiation damage of amorphous silicon, thin-film, field-effect transistors.非晶硅薄膜场效应晶体管的辐射损伤
Med Phys. 1996 May;23(5):743-54. doi: 10.1118/1.597668.
2
Digital radiology using active matrix readout of amorphous selenium: radiation hardness of cadmium selenide thin film transistors.使用非晶态硒有源矩阵读出的数字放射学:硒化镉薄膜晶体管的辐射硬度
Med Phys. 1998 Apr;25(4):527-38. doi: 10.1118/1.598233.
3
Carbon nanotube feedback-gate field-effect transistor: suppressing current leakage and increasing on/off ratio.碳纳米管反馈栅场效应晶体管:抑制电流泄漏并提高导通-关断比。
ACS Nano. 2015 Jan 27;9(1):969-77. doi: 10.1021/nn506806b. Epub 2015 Jan 2.
4
Digital radiology using active matrix readout of amorphous selenium: detectors with high voltage protection.采用非晶硒有源矩阵读出的数字放射学:具有高压保护的探测器。
Med Phys. 1998 Apr;25(4):539-49. doi: 10.1118/1.598229.
5
Solution-processable LaZrOx/SiO2 gate dielectric at low temperature of 180 °C for high-performance metal oxide field-effect transistors.用于高性能金属氧化物场效应晶体管的可溶液处理的LaZrOx/SiO2栅极电介质,在180°C低温下制备
ACS Appl Mater Interfaces. 2014 Nov 12;6(21):18693-703. doi: 10.1021/am504231h. Epub 2014 Oct 14.
6
Angular independent silicon detector for dosimetry in external beam radiotherapy.用于外照射放疗剂量测定的角度无关型硅探测器。
Med Phys. 2015 Aug;42(8):4708-18. doi: 10.1118/1.4926778.
7
Dose reduction in patients undergoing chest imaging: digital amorphous silicon flat-panel detector radiography versus conventional film-screen radiography and phosphor-based computed radiography.胸部成像患者的剂量降低:数字非晶硅平板探测器X线摄影与传统屏-片X线摄影及磷光体计算机X线摄影的比较
AJR Am J Roentgenol. 2003 Oct;181(4):923-9. doi: 10.2214/ajr.181.4.1810923.
8
Influence of High-Energy Proton Irradiation on β-GaO Nanobelt Field-Effect Transistors.高能质子辐照对 β-GaO 纳米带场效应晶体管的影响。
ACS Appl Mater Interfaces. 2017 Nov 22;9(46):40471-40476. doi: 10.1021/acsami.7b13881. Epub 2017 Nov 7.
9
Empirical and theoretical investigation of the noise performance of indirect detection, active matrix flat-panel imagers (AMFPIs) for diagnostic radiology.用于放射诊断的间接探测有源矩阵平板成像器(AMFPI)噪声性能的实证与理论研究。
Med Phys. 1997 Jan;24(1):71-89. doi: 10.1118/1.597919.
10
Studies of tetracene- and pentacene-based organic thin-film transistors fabricated by the neutral cluster beam deposition method.通过中性团簇束沉积法制备的并四苯和并五苯基有机薄膜晶体管的研究。
J Phys Chem B. 2005 Dec 22;109(50):23918-24. doi: 10.1021/jp054894r.

引用本文的文献

1
Comparison of CsI:Tl and Gd O S:Tb indirect flat panel detector x-ray imaging performance in front- and back-irradiation geometries.CsI:Tl 和 Gd O S:Tb 间接平板探测器在前后照射几何中的 X 射线成像性能比较。
Med Phys. 2019 Nov;46(11):4857-4868. doi: 10.1002/mp.13791. Epub 2019 Sep 23.
2
Development of quality control system for flat-panel detectors.平板探测器质量控制系统的开发。
Radiol Phys Technol. 2011 Jul;4(2):164-72. doi: 10.1007/s12194-011-0117-2. Epub 2011 Mar 17.
3
Active pixel imagers incorporating pixel-level amplifiers based on polycrystalline-silicon thin-film transistors.
基于多晶硅薄膜晶体管的包含像素级放大器的有源像素成像器。
Med Phys. 2009 Jul;36(7):3340-55. doi: 10.1118/1.3116364.