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高能质子辐照对 β-GaO 纳米带场效应晶体管的影响。

Influence of High-Energy Proton Irradiation on β-GaO Nanobelt Field-Effect Transistors.

机构信息

Department of Chemical and Biological Engineering, Korea University , Seoul 02841, South Korea.

Department of Chemical Engineering, Dankook University , Yongin 16890, South Korea.

出版信息

ACS Appl Mater Interfaces. 2017 Nov 22;9(46):40471-40476. doi: 10.1021/acsami.7b13881. Epub 2017 Nov 7.

DOI:10.1021/acsami.7b13881
PMID:29083157
Abstract

The robust radiation resistance of wide-band gap materials is advantageous for space applications, where the high-energy particle irradiation deteriorates the performance of electronic devices. We report on the effects of proton irradiation of β-GaO nanobelts, whose energy band gap is ∼4.85 eV at room temperature. Back-gated field-effect transistor (FET) based on exfoliated quasi-two-dimensional β-GaO nanobelts were exposed to a 10 MeV proton beam. The proton-dose- and time-dependent characteristics of the radiation-damaged FETs were systematically analyzed. A 73% decrease in the field-effect mobility and a positive shift of the threshold voltage were observed after proton irradiation at a fluence of 2 × 10 cm. Greater radiation-induced degradation occurs in the conductive channel of the β-GaO nanobelt than at the contact between the metal and β-GaO. The on/off ratio of the exfoliated β-GaO FETs was maintained even after proton doses up to 2 × 10 cm. The radiation-induced damage in the β-GaO-based FETs was significantly recovered after rapid thermal annealing at 500 °C. The outstanding radiation durability of β-GaO renders it a promising building block for space applications.

摘要

宽带隙材料具有很强的抗辐射能力,这对空间应用非常有利,因为高能粒子辐照会降低电子设备的性能。我们报告了室温下能隙约为 4.85 eV 的β-GaO 纳米带的质子辐照效应。基于剥离的准二维β-GaO 纳米带的背栅场效应晶体管(FET)暴露于 10 MeV 质子束中。系统分析了辐射损伤 FET 的质子剂量和时间依赖性特性。在 2×1012 cm-2 的辐照通量下,观察到场效应迁移率下降了 73%,阈值电压正向移动。与金属和β-GaO 之间的接触相比,β-GaO 纳米带的导电通道中发生了更大的辐射诱导退化。即使在质子剂量高达 2×1012 cm-2 的情况下,剥离的β-GaO FET 的导通/关断比仍得以维持。在 500°C 的快速热退火后,β-GaO 基 FET 中的辐射诱导损伤得到了显著恢复。β-GaO 的出色抗辐射能力使其成为空间应用的有前途的构建模块。

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