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Dynamic model of the electrode sheaths in symmetrically driven rf discharges.

作者信息

Godyak VA, Sternberg N

出版信息

Phys Rev A. 1990 Aug 15;42(4):2299-2312. doi: 10.1103/physreva.42.2299.

DOI:10.1103/physreva.42.2299
PMID:9904281
Abstract
摘要

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