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使用原子力声学显微镜对接触刚度进行定量测定。

Quantitative determination of contact stiffness using atomic force acoustic microscopy.

作者信息

Rabe U, Amelio S, Kester E, Scherer V, Hirsekorn S, Arnold W

机构信息

Fraunhofer Institute for Nondestructive Testing (IZFP), Saarbrucken, Germany.

出版信息

Ultrasonics. 2000 Mar;38(1-8):430-7. doi: 10.1016/s0041-624x(99)00207-3.

DOI:10.1016/s0041-624x(99)00207-3
PMID:10829701
Abstract

Atomic force acoustic microscopy is a near-field technique which combines the ability of ultrasonics to image elastic properties with the high lateral resolution of scanning probe microscopes. We present a technique to measure the contact stiffness and the Young's modulus of sample surfaces quantitatively, with a resolution of approximately 20 nm, exploiting the contact resonance frequencies of standard cantilevers used in atomic force microscopy. The Young's modulus of nanocrystalline ferrite films has been measured as a function of oxidation temperature. Furthermore, images showing the domain structure of piezoelectric lead zirconate titanate ceramics have been taken.

摘要

原子力声学显微镜是一种近场技术,它将超声成像弹性特性的能力与扫描探针显微镜的高横向分辨率相结合。我们提出了一种利用原子力显微镜中使用的标准悬臂梁的接触共振频率来定量测量样品表面接触刚度和杨氏模量的技术,分辨率约为20纳米。已经测量了纳米晶铁氧体薄膜的杨氏模量随氧化温度的变化。此外,还拍摄了显示压电锆钛酸铅陶瓷畴结构的图像。

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