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具有亚100纳米空间分辨率的图像序列的软X射线光谱学。

Soft x-ray spectroscopy from image sequences with sub-100 nm spatial resolution.

作者信息

Jacobsen C, Wirick S, Flynn G, Zimba C

机构信息

Department of Physics and Astronomy, State University of New York at Stony Brook 11794-3800, USA.

出版信息

J Microsc. 2000 Feb;197(Pt 2):173-84. doi: 10.1046/j.1365-2818.2000.00640.x.

Abstract

A method is described whereby a sequence of X-ray images at closely spaced photon energies is acquired using a scanning transmission X-ray microscope, and aligned. Near-edge absorption spectra can then be obtained both from large, irregular regions, and from regions as small as the spatial resolution of the microscope (about 40 nm in the examples shown here). The use of the technique is illustrated in examination of a layered polymer film, a micrometeorite section, and an interplanetary dust particle section.

摘要

本文描述了一种方法,即使用扫描透射X射线显微镜获取一系列光子能量间隔很近的X射线图像,并进行对齐。然后,既可以从大的不规则区域,也可以从小至显微镜空间分辨率(在此处所示示例中约为40纳米)的区域获得近边吸收光谱。该技术的应用在对层状聚合物薄膜、微陨石切片和行星际尘埃颗粒切片的检测中得到了说明。

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