Sandhu A, Masuda H, Oral A, Bending S J, Yamada A, Konagai M
Research Center for Quantum Effect Electronics, Tokyo Institute of Technology, Japan.
Ultramicroscopy. 2002 May;91(1-4):97-101. doi: 10.1016/s0304-3991(02)00087-6.
A room temperature scanning Hall probe microscope system utilizing GaAs/AlGaAs and bismuth micro-Hall probes was used for magnetic imaging of ferromagnetic domain structures on the surfaces of crystalline thin film garnets and permanent magnets. The Bi micro-Hall probes had dimensions ranging between 0.25 and 2.8 microm2 and were fabricated using a combination of optical lithography and focused ion beam milling. The use of bismuth was found to overcome surface depletion effects associated with semiconducting micro-Hall probes. Our experiments demonstrated that Bi is a practical choice of material for fabricating sub-micron sized Hall sensors.
