Sachser Roland, Hütner Johanna, Schwalb Christian H, Huth Michael
Institute of Physics, Goethe University, Max-von-Laue-Str. 1, 60438 Frankfurt am Main, Germany.
GETec Microscopy GmbH, Am Heumarkt 13, 1030 Wien, Austria.
Nanomaterials (Basel). 2021 Feb 1;11(2):348. doi: 10.3390/nano11020348.
Scanning Hall probe microscopy is attractive for minimally invasive characterization of magnetic thin films and nanostructures by measurement of the emanating magnetic stray field. Established sensor probes operating at room temperature employ highly miniaturized spin-valve elements or semimetals, such as Bi. As the sensor layer structures are fabricated by patterning of planar thin films, their adaption to custom-made sensor probe geometries is highly challenging or impossible. Here we show how nanogranular ferromagnetic Hall devices fabricated by the direct-write method of focused electron beam induced deposition (FEBID) can be tailor-made for any given probe geometry. Furthermore, we demonstrate how the magnetic stray field sensitivity can be optimized in situ directly after direct-write nanofabrication of the sensor element. First proof-of-principle results on the use of this novel scanning Hall sensor are shown.
扫描霍尔探针显微镜通过测量发散的杂散磁场，对磁性薄膜和纳米结构进行微创表征，具有很大吸引力。在室温下工作的现有传感器探针采用高度小型化的自旋阀元件或半金属，如铋。由于传感器层结构是通过平面薄膜的图案化制造的，因此将其适配到定制的传感器探针几何形状极具挑战性甚至是不可能的。在这里，我们展示了如何通过聚焦电子束诱导沉积（FEBID）的直写方法制造的纳米颗粒铁磁霍尔器件，可以针对任何给定的探针几何形状进行定制。此外，我们还展示了如何在传感器元件直写纳米制造后直接原位优化杂散磁场灵敏度。展示了使用这种新型扫描霍尔传感器的首个原理验证结果。
