Measurement of longitudinal piezoelectric coefficient of thin films by a laser-scanning vibrometer.
作者信息
Yao Kui, Tay Francis Eng Hock
出版信息
IEEE Trans Ultrason Ferroelectr Freq Control. 2003 Feb;50(2):113-6. doi: 10.1109/tuffc.2003.1182115.
PMID:12625584
Abstract
A laser scanning vibrometer (LSV) was used for the first time to measure the piezoelectric coefficient of ferroelectric thin films based on the converse piezoelectric effect. The significant advantages of the use of the LSV for this purpose were demonstrated. Several key points were discussed in order to achieve reliable and accurate results.
摘要
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