Zhang X W, Boyen H-G, Deyneka N, Ziemann P, Banhart F, Schreck M
Abteilung Festkörperphysik, Universität Ulm, D-89069 Ulm, Germany.
Nat Mater. 2003 May;2(5):312-5. doi: 10.1038/nmat870.
Cubic boron nitride (c-BN), although offering a number of highly attractive properties comparable to diamond, like hardness, chemical inertness and a large electronic bandgap, up to now has not found the attention it deserves. This mostly has to do with preparational problems, with easy chemical routes not available and, instead, the necessity to apply ion-bombardment-assisted methods. Hence, most of the c-BN samples prepared as thin films have been nanocrystalline, making the prospect of using this material for high-temperature electronic applications an illusion. Although heteroepitaxial nucleation of c-BN on diamond substrates has been demonstrated using the high-pressure-high-temperature technique, none of the low-pressure methods ever succeeded in the epitaxial growth of c-BN on any substrate. Here, we demonstrate that heteroepitaxial c-BN films can be prepared at 900 degrees C on highly (001)-oriented diamond films, formed by chemical vapour deposition, using ion-beam-assisted deposition as a low-pressure technique. The orientation relationship was found to be c-BN(001)[100]||diamond(001)[100]. High-resolution transmission electron microscopy additionally proved that epitaxy can be achieved without an intermediate hexagonal BN layer that is commonly observed on various substrates.
立方氮化硼(c-BN)虽然具有许多与金刚石相当的极具吸引力的特性,如硬度、化学惰性和较大的电子带隙,但迄今为止尚未得到应有的关注。这主要与制备问题有关,由于没有简便的化学方法,而是需要采用离子轰击辅助方法。因此,大多数制备成薄膜的c-BN样品都是纳米晶的,这使得将这种材料用于高温电子应用的前景成为泡影。尽管使用高压高温技术已证明c-BN可在金刚石衬底上异质外延成核,但没有一种低压方法能成功地在任何衬底上实现c-BN的外延生长。在此,我们证明,使用离子束辅助沉积作为低压技术,可在通过化学气相沉积形成的高度(001)取向的金刚石薄膜上于900℃制备异质外延c-BN薄膜。发现其取向关系为c-BN(001)[100]||金刚石(001)[100]。高分辨率透射电子显微镜还证明,外延生长无需通常在各种衬底上观察到的中间六方BN层即可实现。