Cheng Ya, Sugioka Koji, Midorikawa Katsumi, Masuda Masashi, Toyoda Koichi, Kawachi Masako, Shihoyama Kazuhiko
RIKEN, The Institute of Physical and Chemical Research, Hirosawa 2-1, Wako, Saitama 351-0198, Japan.
Opt Lett. 2003 Jul 1;28(13):1144-6. doi: 10.1364/ol.28.001144.
We show that three-dimensional micro-optical components can be embedded in a photosensitive glass by a femtosecond (fs) laser. After exposure to the tightly focused fs laser beam, latent images are written inside the sample. Modified regions are developed by a postbaking process and then preferentially etched away in a 10%-dilute solution of hydrofluoric acid. After this process, hollow internal structures are formed that act as a mirror and a beam splitter. Furthermore, we find that postannealing smoothes the surfaces of the fabricated hollow structures, resulting in great improvement of their optical properties.
我们证明，三维微光学元件可以通过飞秒（fs）激光嵌入到光敏玻璃中。在暴露于紧密聚焦的飞秒激光束后，潜像被写入样品内部。通过后烘焙工艺显影改性区域，然后在10%的氢氟酸稀释溶液中优先蚀刻掉。经过这个过程，形成了中空的内部结构，其起到镜子和分束器的作用。此外，我们发现后退火使制造的中空结构表面光滑，从而极大地改善了它们的光学性能。
