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使用多孔氧化铝纳米模板在硅衬底上制备垂直排列的碳纳米管及其表征

Fabrication and characterization of vertically aligned carbon nanotubes on silicon substrates using porous alumina nanotemplates.

作者信息

Hu Wenchong, Yuan Liming, Chen Zhi, Gong Dawei, Saito Kozo

机构信息

Department of Electrical and Computer Engineering, Center for Micro-Magnetic and Electronic Devices, University of Kentucky, Lexington, Kentucky, USA.

出版信息

J Nanosci Nanotechnol. 2002 Apr;2(2):203-7. doi: 10.1166/jnn.2002.104.

Abstract

An ethylene-air laminar diffusion flame successfully provided silicon substrates of anodic aluminum oxide (AAO) template with vertically oriented well-aligned carbon nanotubes. Field emission scanning electron microscopy (SEM) showed that open-tipped carbon nanotubes consisting of tube elements with the same length and diameter uniformly coated the template. High-resolution transmission electron microscopy (TEM) analyses revealed these nanotubes to be multiwalled carbon nanotubes, some well graphitized. It was found that cobalt catalyst particles, but not the porous aluminum templates, helped the growth of carbon nanotubes through graphitization and bonding of carbon nanotubes to the silicon substrates.

摘要

乙烯-空气层流扩散火焰成功地为阳极氧化铝(AAO)模板的硅基板提供了垂直取向且排列整齐的碳纳米管。场发射扫描电子显微镜(SEM)显示,由长度和直径相同的管元素组成的开口尖端碳纳米管均匀地覆盖在模板上。高分辨率透射电子显微镜(TEM)分析表明,这些纳米管是多壁碳纳米管,有些已高度石墨化。研究发现,钴催化剂颗粒而非多孔铝模板通过碳纳米管的石墨化和与硅基板的结合促进了碳纳米管的生长。

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