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通过反射电子全息术对表面进行观察。

Observation of surfaces by reflection electron holography.

作者信息

Osakabe N

机构信息

Advanced Research Laboratory, Hitachi, Ltd., Saitama, Japan.

出版信息

Microsc Res Tech. 1992 Feb 15;20(4):457-62. doi: 10.1002/jemt.1070200415.

Abstract

Reflection electron holography is described as a method to observe sub-A surface morphology. Phase shift of a Bragg-reflected electron wave was measured by means of holographic interferometry using an electron microscope equipped with a field emission electron gun and an electron biprism. A short wavelength of high energy electrons is the essential key to the high vertical sensitivity of this method, since geometrical path differences produced by the surface topography are measured in units of wavelengths in interferometrical measuring. Phase shift at a monoatomic step and the displacement field around a dislocation emerging on the surface were observed.

摘要

反射电子全息术被描述为一种观察亚表面形貌的方法。利用配备场发射电子枪和电子双棱镜的电子显微镜,通过全息干涉测量法测量布拉格反射电子波的相移。高能电子的短波长是该方法具有高垂直灵敏度的关键因素,因为在干涉测量中,由表面形貌产生的几何路径差是以波长为单位进行测量的。观察到了单原子台阶处的相移以及表面出现的位错周围的位移场。

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