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通过旋涂法制备的高迁移率超薄半导体薄膜。

High-mobility ultrathin semiconducting films prepared by spin coating.

作者信息

Mitzi David B, Kosbar Laura L, Murray Conal E, Copel Matthew, Afzali Ali

机构信息

IBM T. J. Watson Research Center, PO Box 218, Yorktown Heights, New York 10598, USA.

出版信息

Nature. 2004 Mar 18;428(6980):299-303. doi: 10.1038/nature02389.

DOI:10.1038/nature02389
PMID:15029191
Abstract

The ability to deposit and tailor reliable semiconducting films (with a particular recent emphasis on ultrathin systems) is indispensable for contemporary solid-state electronics. The search for thin-film semiconductors that provide simultaneously high carrier mobility and convenient solution-based deposition is also an important research direction, with the resulting expectations of new technologies (such as flexible or wearable computers, large-area high-resolution displays and electronic paper) and lower-cost device fabrication. Here we demonstrate a technique for spin coating ultrathin (approximately 50 A), crystalline and continuous metal chalcogenide films, based on the low-temperature decomposition of highly soluble hydrazinium precursors. We fabricate thin-film field-effect transistors (TFTs) based on semiconducting SnS(2-x)Se(x) films, which exhibit n-type transport, large current densities (>10(5) A cm(-2)) and mobilities greater than 10 cm2 V(-1) s(-1)--an order of magnitude higher than previously reported values for spin-coated semiconductors. The spin-coating technique is expected to be applicable to a range of metal chalcogenides, particularly those based on main group metals, as well as for the fabrication of a variety of thin-film-based devices (for example, solar cells, thermoelectrics and memory devices).

摘要

沉积并定制可靠的半导体薄膜(近期尤其侧重于超薄体系)的能力对于当代固态电子学而言不可或缺。寻找同时具备高载流子迁移率且能通过基于溶液的方式方便沉积的薄膜半导体,也是一个重要的研究方向,由此催生了对新技术(如柔性或可穿戴计算机、大面积高分辨率显示器及电子纸)以及低成本器件制造的期望。在此,我们展示了一种基于高溶解性肼盐前驱体的低温分解来旋涂超薄(约50埃)、结晶且连续的金属硫族化物薄膜的技术。我们基于半导体SnS(2 - x)Se(x)薄膜制造了薄膜场效应晶体管(TFT),其呈现n型传输特性,具有大电流密度(>10(5) A cm(-2))以及大于10 cm2 V(-1) s(-1)的迁移率——比之前报道的旋涂半导体的值高出一个数量级。预计该旋涂技术适用于一系列金属硫族化物,特别是基于主族金属的那些,以及用于制造各种基于薄膜的器件(例如太阳能电池、热电材料和存储器件)。

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