用于乙醇传感的在Al2O3衬底上溅射的纳米结构Ni/Pt/Ti薄膜。

A sputtered thin film of nanostructured Ni/Pt/Ti on Al2O3 substrate for ethanol sensing.

作者信息

Weng Yu-Ching, Rick John Frank, Chou Tse-Chuan

机构信息

Department of Chemical Engineering, National Cheng Kung University, Tainan 701, Taiwan.

出版信息

Biosens Bioelectron. 2004 Jul 30;20(1):41-51. doi: 10.1016/j.bios.2004.01.027.

DOI:10.1016/j.bios.2004.01.027

PMID:15142575

Abstract

A novel thin film ethanol sensor using sputtered Ni/Pt/Ti on an Al2O3 substrate as the working electrode in an alkaline solution was developed. Atomic force microscopy (AFM) and scanning electron microscopy (SEM) were used to characterize the nanostructure of nickel films. Sputtering deposition conditions for maximum catalytic efficiency, electrode selectivity, and reproducibility were discussed. The results showed that ethanol oxidation was more efficient on the sputtered Ni/Pt/Ti on an Al2O3 substrate electrode than that on the conventional nickel electrode. The optimal operating conditions to generate the sputtered Ni/Pt/Ti on the Al2O3 substrate electrode were: 45 min of Ni sputtering deposition time, and 50 W of Ni sputtering power. The results also indicated that the response time of the prepared ethanol sensor is 27 s and the best sensitivity is 3.08 microA microM(-1) cm(-2).

摘要

开发了一种新型薄膜乙醇传感器，该传感器在碱性溶液中使用溅射在Al2O3衬底上的Ni/Pt/Ti作为工作电极。利用原子力显微镜（AFM）和扫描电子显微镜（SEM）对镍膜的纳米结构进行了表征。讨论了实现最大催化效率、电极选择性和重现性的溅射沉积条件。结果表明，在Al2O3衬底电极上溅射的Ni/Pt/Ti上乙醇氧化比在传统镍电极上更有效。在Al2O3衬底电极上溅射Ni/Pt/Ti的最佳操作条件为：Ni溅射沉积时间45分钟，Ni溅射功率50W。结果还表明，所制备的乙醇传感器的响应时间为27秒，最佳灵敏度为3.08微安微摩尔-1厘米-2。