• 文献检索
  • 文档翻译
  • 深度研究
  • 学术资讯
  • Suppr Zotero 插件Zotero 插件
  • 邀请有礼
  • 套餐&价格
  • 历史记录
应用&插件
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
定价
高级版会员购买积分包购买API积分包
服务
文献检索文档翻译深度研究API 文档MCP 服务
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利：CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2026

文献检索

告别复杂PubMed语法，用中文像聊天一样搜索，搜遍4000万医学文献。AI智能推荐，让科研检索更轻松。

立即免费搜索

文件翻译

保留排版，准确专业，支持PDF/Word/PPT等文件格式，支持 12+语言互译。

免费翻译文档

深度研究

AI帮你快速写综述，25分钟生成高质量综述，智能提取关键信息，辅助科研写作。

立即免费体验

用于高温和恶劣环境应用的γ-Al₂O₃上电沉积铂膜的Ti、Cr、W、Ta和Pt作为籽晶层的性能研究。

Capability Study of Ti, Cr, W, Ta and Pt as Seed Layers for Electrodeposited Platinum Films on γ-Al₂O₃ for High Temperature and Harsh Environment Applications.

作者信息

Seifert Marietta, Brachmann Erik, Rane Gayatri K, Menzel Siegfried B, Gemming Thomas

机构信息

SAWLab Saxony, IFW Dresden, P.O. Box 270116, 01171 Dresden, Germany.

出版信息

Materials (Basel). 2017 Jan 11;10(1):54. doi: 10.3390/ma10010054.

DOI:10.3390/ma10010054
PMID:28772415
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5344629/
Abstract

High temperature surface acoustic wave sensors based on radio frequency identification technology require adequate antennas of high efficiency and thermal stability for the signal transmission. Platinum is well known and frequently used as a material of choice for high temperature and harsh environment applications because of the high melting point and its chemical stability. Therefore, one way to realize high temperature stable antennas is the combination of a Pt metallization on an Al 2 O 3 substrate. As a cost-effective technique, the Pt film is deposited via electrochemical deposition. For this growth procedure, a pre-deposited metallization on the Al 2 O 3 layer is required. This paper analyzes the influence of various seed layers (Ta, Ti, W, Cr, Pt) on the morphology, stability and electrical properties of the electrochemically-grown Pt thick film after heat treatments up to 1000 ∘ C in air. We find an oxidation of all adhesion layers except for Pt, for which the best electrical properties were measured. Although significant areas of the films delaminate from the substrate, individual anchor structures retain a stable connection between the Pt layer and the rough Al 2 O 3 substrate.

摘要

基于射频识别技术的高温表面声波传感器需要高效且热稳定的天线来进行信号传输。铂因其高熔点和化学稳定性，是高温及恶劣环境应用中广为人知且常用的首选材料。因此，实现高温稳定天线的一种方法是在氧化铝衬底上进行铂金属化处理。作为一种经济高效的技术，铂膜通过电化学沉积来制备。对于这种生长过程，需要在氧化铝层上预先沉积金属化层。本文分析了在空气中加热至1000℃后，各种种子层（钽、钛、钨、铬、铂）对电化学生长的铂厚膜的形貌、稳定性和电学性能的影响。我们发现除铂之外的所有粘附层都会发生氧化，而铂层的电学性能最佳。尽管膜的大片区域从衬底上分层，但单个锚固结构在铂层和粗糙的氧化铝衬底之间保持着稳定的连接。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/802d1aa451d4/materials-10-00054-g015.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/4f4fd1475072/materials-10-00054-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/8173678f0608/materials-10-00054-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/c3ffead1b6c9/materials-10-00054-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/afa7847e82dc/materials-10-00054-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/90ecc847b419/materials-10-00054-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/e70c87f0044b/materials-10-00054-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/b40fc9f04ff8/materials-10-00054-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/c7c6a1d142e0/materials-10-00054-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/ee77f098ff02/materials-10-00054-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/32cce3cc84e3/materials-10-00054-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/4ba3492c9ced/materials-10-00054-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/fe58e49f0539/materials-10-00054-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/be328e4370b8/materials-10-00054-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/a13f8b79dc2c/materials-10-00054-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/802d1aa451d4/materials-10-00054-g015.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/4f4fd1475072/materials-10-00054-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/8173678f0608/materials-10-00054-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/c3ffead1b6c9/materials-10-00054-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/afa7847e82dc/materials-10-00054-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/90ecc847b419/materials-10-00054-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/e70c87f0044b/materials-10-00054-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/b40fc9f04ff8/materials-10-00054-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/c7c6a1d142e0/materials-10-00054-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/ee77f098ff02/materials-10-00054-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/32cce3cc84e3/materials-10-00054-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/4ba3492c9ced/materials-10-00054-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/fe58e49f0539/materials-10-00054-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/be328e4370b8/materials-10-00054-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/a13f8b79dc2c/materials-10-00054-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eefb/5344629/802d1aa451d4/materials-10-00054-g015.jpg

相似文献

1
Capability Study of Ti, Cr, W, Ta and Pt as Seed Layers for Electrodeposited Platinum Films on γ-Al₂O₃ for High Temperature and Harsh Environment Applications.用于高温和恶劣环境应用的γ-Al₂O₃上电沉积铂膜的Ti、Cr、W、Ta和Pt作为籽晶层的性能研究。
Materials (Basel). 2017 Jan 11;10(1):54. doi: 10.3390/ma10010054.
2
Platinum metallization for MEMS application. Focus on coating adhesion for biomedical applications.用于微机电系统（MEMS）应用的铂金属化。关注生物医学应用中的涂层附着力。
Biomatter. 2014;4. doi: 10.4161/biom.28822.
3
Electroless-Deposited Platinum Antennas for Wireless Surface Acoustic Wave Sensors.用于无线表面声波传感器的化学沉积铂天线。
Materials (Basel). 2019 Mar 27;12(7):1002. doi: 10.3390/ma12071002.
4
Improvement of High-Temperature Stability of Al₂O₃/Pt/ZnO/Al₂O₃ Film Electrode for SAW Devices by Using Al₂O₃ Barrier Layer.通过使用氧化铝阻挡层提高用于声表面波器件的Al₂O₃/Pt/ZnO/Al₂O₃薄膜电极的高温稳定性
Materials (Basel). 2017 Dec 1;10(12):1377. doi: 10.3390/ma10121377.
5
Novel AlN/Pt/ZnO Electrode for High Temperature SAW Sensors.用于高温声表面波传感器的新型氮化铝/铂/氧化锌电极
Materials (Basel). 2017 Jan 16;10(1):69. doi: 10.3390/ma10010069.
6
Studies on the Platinum Thick Film Sensor Conformally Written by Laser Micro-Cladding: Formability, Microstructure, and Performance.激光微熔敷直写铂厚膜传感器的研究：成形性、微观结构和性能。
ACS Appl Mater Interfaces. 2023 Apr 19;15(15):19209-19219. doi: 10.1021/acsami.3c01974. Epub 2023 Apr 11.
7
Pt thin-film resistance thermo detectors with stable interfaces for potential integration in SiC high-temperature pressure sensors.具有稳定界面的铂薄膜电阻热探测器，有望集成到碳化硅高温压力传感器中。
Microsyst Nanoeng. 2024 Sep 26;10(1):133. doi: 10.1038/s41378-024-00746-w.
8
The Investigation of High-Temperature SAW Oxygen Sensor Based on ZnO Films.基于ZnO薄膜的高温声表面波氧传感器研究
Materials (Basel). 2019 Apr 15;12(8):1235. doi: 10.3390/ma12081235.
9
Flexible Neural Probe Fabrication Enhanced with a Low-Temperature Cured Polyimide and Platinum Electrodeposition.低温固化聚酰亚胺增强的柔性神经探针制作及铂电沉积
Sensors (Basel). 2022 Dec 10;22(24):9674. doi: 10.3390/s22249674.
10
Mo-LaO Multilayer Metallization Systems for High Temperature Surface Acoustic Wave Sensor Devices.用于高温表面声波传感器器件的钼镧氧化物多层金属化系统
Materials (Basel). 2019 Aug 21;12(17):2651. doi: 10.3390/ma12172651.

引用本文的文献

1
Miniaturized Capsule System Toward Real-Time Electrochemical Detection of H S in the Gastrointestinal Tract.微型胶囊系统实时电化学检测胃肠道中的 H<sub>2</sub>S
Adv Healthc Mater. 2024 Feb;13(5):e2302897. doi: 10.1002/adhm.202302897. Epub 2023 Dec 10.
2
Electroless-Deposited Platinum Antennas for Wireless Surface Acoustic Wave Sensors.用于无线表面声波传感器的化学沉积铂天线。
Materials (Basel). 2019 Mar 27;12(7):1002. doi: 10.3390/ma12071002.

本文引用的文献

1
Pseudo-orthogonal frequency coded wireless SAW RFID temperature sensor tags.伪正交频分无线声表面波 RFID 温度传感器标签。
IEEE Trans Ultrason Ferroelectr Freq Control. 2012 Aug;59(8):1750-8. doi: 10.1109/TUFFC.2012.2379.
2
Review on SAW RFID tags.SAW RFID 标签综述。
IEEE Trans Ultrason Ferroelectr Freq Control. 2010 Mar;57(3):654-68. doi: 10.1109/TUFFC.2010.1462.
3
Temperature-compensated aluminum nitride lamb wave resonators.温度补偿氮化铝兰姆波谐振器。
IEEE Trans Ultrason Ferroelectr Freq Control. 2010 Mar;57(3):524-32. doi: 10.1109/TUFFC.2010.1443.
4
Platinum and palladium high-temperature transducers on langasite.硅酸镧镓晶体上的铂和钯高温传感器
IEEE Trans Ultrason Ferroelectr Freq Control. 2005 Apr;52(4):545-9. doi: 10.1109/tuffc.2005.1428035.
5
A sputtered thin film of nanostructured Ni/Pt/Ti on Al2O3 substrate for ethanol sensing.用于乙醇传感的在Al2O3衬底上溅射的纳米结构Ni/Pt/Ti薄膜。
Biosens Bioelectron. 2004 Jul 30;20(1):41-51. doi: 10.1016/j.bios.2004.01.027.