Langford R M, Clinton C
SFI Trinity Nanoscience Laboratory, Department of Physics, Trinity College Dublin, Dublin 2, Ireland.
Micron. 2004;35(7):607-11. doi: 10.1016/j.micron.2004.03.002.
An in situ 'lift-out' technique for preparing transmission electron microscopy specimens, which is performed using secondary electron imaging within the chamber of a focused ion beam-SEM system is presented. The main advantage of this in situ approach, relative to the ex situ lift-out technique, is that secondary electron imaging enables higher magnifications to be used than is possible with optical microscopy. This makes the lift-out procedure more controllable and thus increases the overall success rate especially for inexperienced users. The technique is also compared with another in situ lift-out approach, the 'wedge' technique.
本文介绍了一种用于制备透射电子显微镜标本的原位“取出”技术，该技术是在聚焦离子束扫描电子显微镜系统的腔室内利用二次电子成像来进行的。相对于非原位取出技术，这种原位方法的主要优点是，二次电子成像能够使用比光学显微镜更高的放大倍数。这使得取出过程更易于控制，从而提高了总体成功率，尤其是对于缺乏经验的用户。该技术还与另一种原位取出方法“楔形”技术进行了比较。
