Verbeeck J, Van Aert S
Electron Microscopy for Materials Research (EMAT), University of Antwerp, Groenenborgerlaan 171, 2020 Antwerp, Belgium.
Ultramicroscopy. 2004 Nov;101(2-4):207-24. doi: 10.1016/j.ultramic.2004.06.004.
Recent advances in model based quantification of electron energy loss spectra (EELS) are reported. The maximum likelihood method for the estimation of physical parameters describing an EELS spectrum, the validation of the model used in this estimation procedure, and the computation of the attainable precision, that is, the theoretical lower bound on the variance of these estimates, are discussed. Experimental examples on Au and GaAs samples show the power of the maximum likelihood method and show that the theoretical prediction of the attainable precision can be closely approached even for spectra with overlapping edges where conventional EELS quantification fails. To provide end-users with a low threshold alternative to conventional quantification, a user friendly program was developed which is freely available under a GNU public license.
报告了基于模型的电子能量损失谱（EELS）定量分析的最新进展。讨论了用于估计描述EELS谱的物理参数的最大似然法、该估计过程中所用模型的验证以及可达到精度的计算，即可达到精度为这些估计值方差的理论下限。对金和砷化镓样品的实验示例展示了最大似然法的强大功能，并表明即使对于传统EELS定量分析失败的具有重叠边缘的谱，也能非常接近可达到精度的理论预测。为了为终端用户提供一种比传统定量分析门槛更低的方法，开发了一个用户友好型程序，该程序可根据GNU公共许可证免费获取。
