Nejadmalayeri Amir H, Herman Peter R, Burghoff Jonas, Will Matthias, Nolte Stefan, Tünnermann Andreas
Photonics Group, Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Road, Toronto, Ontario M5S 3G4, Canada.
Opt Lett. 2005 May 1;30(9):964-6. doi: 10.1364/ol.30.000964.
For the first time to the authors' knowledge, optical waveguides have been inscribed in bulk crystalline silicon by ultrafast laser radiation. Femtosecond laser pulses of 40-nm spectral bandwidth, 1-kHz repetition rate, and 1.7-microJ on-target energy were applied at a mid-infrared wavelength of 2.4 microm to induce nonlinear absorption in the focal volume of the beam. By scanning the laser beam with respect to the sample, buried optical waveguides have been created that were single mode at 1550 and 1320 nm and guided light only with its polarization perpendicular to the sample's surface. Propagation losses with an upper limit of 1.2 dB/cm or less were observed throughout the optical telecommunications band.
据作者所知，首次通过超快激光辐射在块状晶体硅中写入了光波导。在2.4微米的中红外波长下，施加了光谱带宽为40纳米、重复频率为1千赫兹、靶上能量为1.7微焦的飞秒激光脉冲，以在光束的焦斑区域诱导非线性吸收。通过相对于样品扫描激光束，创建了掩埋光波导，这些光波导在1550纳米和1320纳米处为单模，并且仅以垂直于样品表面的偏振态传导光。在整个光通信波段观察到传播损耗上限为1.2分贝/厘米或更低。
