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用于细胞外记录的具有浮栅的N沟道场效应晶体管。

N-Channel field-effect transistors with floating gates for extracellular recordings.

作者信息

Meyburg Sven, Goryll Michael, Moers Jürgen, Ingebrandt Sven, Böcker-Meffert Simone, Lüth Hans, Offenhäusser Andreas

机构信息

Institute of Thin Films and Interfaces and Center of Nanoelectronic Systems, Bio- and Chemosensors (ISG2), Forschungszentrum Jülich GmbH, D-52425 Jülich, Germany.

出版信息

Biosens Bioelectron. 2006 Jan 15;21(7):1037-44. doi: 10.1016/j.bios.2005.03.010. Epub 2005 Jul 18.

Abstract

A field-effect transistor (FET) for recording extracellular signals from electrogenic cells is presented. The so-called floating gate architecture combines a complementary metal oxide semiconductor (CMOS)-type n-channel transistor with an independent sensing area. This concept allows the transistor and sensing area to be optimised separately. The devices are robust and can be reused several times. The noise level of the devices was smaller than of comparable non-metallised gate FETs. In addition to the usual drift of FET devices, we observed a long-term drift that has to be controlled for future long-term measurements. The device performance for extracellular signal recording was tested using embryonic rat cardiac myocytes cultured on fibronectin-coated chips. The extracellular cell signals were recorded before and after the addition of the cardioactive isoproterenol. The signal shapes of the measured action potentials were comparable to the non-metallised gate FETs previously used in similar experiments. The fabrication of the devices involved the process steps of standard CMOS that were necessary to create n-channel transistors. The implementation of a complete CMOS process would facilitate the integration of the logical circuits necessary for signal pre-processing on a chip, which is a prerequisite for a greater number of sensor spots in future layouts.

摘要

本文介绍了一种用于记录电活性细胞胞外信号的场效应晶体管(FET)。所谓的浮栅架构将互补金属氧化物半导体(CMOS)型n沟道晶体管与独立的传感区域相结合。这一概念使得晶体管和传感区域能够分别进行优化。这些器件坚固耐用,可重复使用多次。这些器件的噪声水平低于同类未金属化栅极的FET。除了FET器件常见的漂移外,我们还观察到一种长期漂移,在未来的长期测量中必须加以控制。使用培养在纤连蛋白包被芯片上的胚胎大鼠心肌细胞测试了胞外信号记录的器件性能。在添加心脏活性异丙肾上腺素之前和之后记录胞外细胞信号。所测量动作电位的信号形状与之前在类似实验中使用的未金属化栅极FET相当。器件的制造涉及创建n沟道晶体管所需的标准CMOS工艺步骤。完整CMOS工艺的实施将有助于在芯片上集成信号预处理所需的逻辑电路,这是未来布局中增加传感器点数量的前提条件。

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