Tang Xiaohu, Joy David C
Electron Microscope Facility, University of Tennessee, Knoxville 37996-0840, USA.
Scanning. 2005 Nov-Dec;27(6):293-7. doi: 10.1002/sca.4950270604.
In the variable pressure scanning electron microscope (VP-SEM) the incident electrons pass through a gaseous environment and the beam is scattered by these interactions. We show here that the experimental intensity profile of the scattered beam can be described as Gaussian in form to a high level of accuracy. This provides a rapid means of accounting for the effects of beam scatter in imaging and microanalysis because the standard deviation of the Gaussian is a simple function of parameters such as working distance, beam energy, gas type and pressure.
