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A method to measure the effective gas path length in the environmental or variable pressure scanning electron microscope.

作者信息

Gauvin Raynald, Griffin Brendan, Nockolds Clive, Phillips Mathew, Joy David C

机构信息

Department of Mining, Metals and Materials Engineering, McGill University, Montréal, Québec, Canada.

出版信息

Scanning. 2002 Jul-Aug;24(4):171-4. doi: 10.1002/sca.4950240402.

DOI:10.1002/sca.4950240402
PMID:12166803
Abstract

A simple method is described to determine the effective gas path length when incident electrons scatter in the gas above the specimen. This method is based on the measurement of a characteristic x-ray line emitted from a region close to the incident beam. From various experimental measurements performed on various microscopes, it is shown that the effective gas path length may increase with the chamber pressure and that it is also often dependent of the type of x-ray bullet.

摘要

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