Mutyala Madhu Santosh Ku, Bandhanadham Deepika, Pan Liu, Pendyala Vijaya Rohini, Ji Hai-Feng
Institute for Micromanufacturing, Louisiana Tech University, Ruston, LA 71272, USA.
Acta Mech Sin. 2009 Feb 1;25(1):1-12. doi: 10.1007/s10409-008-0222-6.
Advances in the field of Micro Electro Mechanical Systems (MEMS) and their uses now offer unique opportunities in the design of ultrasensitive analytical tools. The analytical community continues to search for cost-effective, reliable, and even portable analytical techniques that can give reliable and fast response results for a variety of chemicals and biomolecules. Microcantilevers (MCLs) have emerged as a unique platform for label-free biosensor or bioassay. Several electronic designs, including piezoresistive, piezoelectric, and capacitive approaches, have been applied to measure the bending or frequency change of the MCLs upon exposure to chemicals. This review summarizes mechanical, fabrication, and electronics approaches to increase the sensitivity of microcantilever (MCL) sensors.
微机电系统（MEMS）领域的进展及其应用如今在超灵敏分析工具的设计中提供了独特机遇。分析界一直在寻找具有成本效益、可靠且甚至便携的分析技术，这些技术能够针对各种化学物质和生物分子给出可靠且快速的响应结果。微悬臂梁（MCL）已成为用于无标记生物传感器或生物测定的独特平台。包括压阻式、压电式和电容式方法在内的几种电子设计已被应用于测量MCL在接触化学物质时的弯曲或频率变化。本综述总结了提高微悬臂梁（MCL）传感器灵敏度的机械、制造和电子方法。
