Tan B J Y, Sow C H, Koh T S, Chin K C, Wee A T S, Ong C K
Department of Physics, Blk S12, Faculty of Science, National University of Singapore, 2 Science Drive 3, Singapore 117542, USA.
J Phys Chem B. 2005 Jun 9;109(22):11100-9. doi: 10.1021/jp045172n.
Two-dimensional ordered arrays of gold (Au) nanoparticles were fabricated using two different variants of the nanosphere lithography technique. First, ordered arrays of polystyrene nanospheres on Si substrate were used as deposition masks through which gold films were deposited by electron beam evaporation. After the removal of the nanospheres, an array of triangular Au nanodisks was left on the Si substrate. After thermal annealing at increasing temperature, systematic shape transition of the nanostructures from original triangular Au nanodisks to rounded nanoparticles was observed. This approach allows us to systematically vary the size and morphology of the particles. In the second and novel technique, we made use of reactive ion etching to simultaneously reduce the dimension of the masking nanospheres and create arrays of nanopores on the substrate prior to the deposition of the Au films. These samples were subsequently annealed, which resulted in size-tunable and ordered Au nanoparticle arrays with the nanoparticles nested in the nanopores of the templated substrate. With the nanoparticles anchored in the nanopores, the substrate could be useful as a template for growth of other nanomaterials.
利用纳米球光刻技术的两种不同变体制作了二维有序排列的金（Au）纳米颗粒。首先，将硅衬底上的聚苯乙烯纳米球有序阵列用作沉积掩膜，通过电子束蒸发在其上沉积金膜。去除纳米球后，硅衬底上留下了三角形金纳米盘阵列。在升高温度下进行热退火后，观察到纳米结构从原始三角形金纳米盘到圆形纳米颗粒的系统形状转变。这种方法使我们能够系统地改变颗粒的尺寸和形态。在第二种新颖技术中，我们利用反应离子蚀刻在沉积金膜之前同时减小掩蔽纳米球的尺寸并在衬底上创建纳米孔阵列。随后对这些样品进行退火，得到了尺寸可调且有序的金纳米颗粒阵列，纳米颗粒嵌套在模板化衬底的纳米孔中。由于纳米颗粒固定在纳米孔中，该衬底可作为生长其他纳米材料的模板。
