Nanosphere lithography: the effect of chemical etching and annealing sequence on the shape and spectrum of nano-metal arrays.

In this paper, it is shown that the sequence of chemical etching of the template and annealing has a significant effect on the shape and spectrum of the nano-metal arrays fabricated by nanosphere lithography (NSL). Higher nanoparticles with sharp edges are fabricated as a consequence of annealing the metal coated template, which is a 2d colloidal crystal, before chemical etching. Consequently, the absorption spectra of the fabricated sample become much sharper, in comparison with the one that is fabricated with the reversed order and also a shift is observed in the peak wavelength. The achieved result has practical importance for the applications of these nano-metal arrays in localized surface plasmon resonance (LSPR) based sensors.