Xu Qiaobing, Perez-Castillejos Raquel, Li Zhefeng, Whitesides George M
Department of Chemistry and Chemical Biology, Harvard University, 12 Oxford Street, Cambridge, Massachusetts 02138, USA.
Nano Lett. 2006 Sep;6(9):2163-5. doi: 10.1021/nl0615672.
This communication describes the fabrication of gold structures (for example, rings) with wall thickness of 40 nm, and with high aspect ratios up to 25. This technique combines thin-film deposition of metal on a topographically patterned epoxy substrate, with nanometer-scale sectioning using a microtome in a plane parallel to the patterned substrate. The dimensions of the metal structures are determined by the thickness of the metal film and the thickness of the epoxy sections. The shape of the resulting nanostructure is defined by the cross section of the original template.
本通讯描述了壁厚为40纳米、高宽比高达25的金结构(如环)的制造方法。该技术将金属薄膜沉积在具有形貌图案的环氧基底上,再使用切片机在与图案化基底平行的平面上进行纳米级切片。金属结构的尺寸由金属薄膜的厚度和环氧切片的厚度决定。所得纳米结构的形状由原始模板的横截面确定。