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电子能量损失谱学的新进展。

New developments in electron energy loss spectroscopy.

作者信息

Keast V J, Bosman M

机构信息

School of Mathematical and Physical Science, The University of Newcastle, Callaghan, New South Wales, Australia.

出版信息

Microsc Res Tech. 2007 Mar;70(3):211-9. doi: 10.1002/jemt.20407.

Abstract

In the electron microscope, spectroscopic signals such as the characteristic X-rays or the energy loss of the incident beam can provide an analysis of the local composition or electronic structure. Recent improvements in the energy resolution and sensitivity of electron spectrometers have improved the quality of spectra that can be obtained. Concurrently, the calculations used to simulate and interpret spectra have made major advances. These developments will be briefly reviewed. In recent years, the focus of analytical electron microscopy has moved away from single spectrum acquisition to mapping and imaging. In particular, the use of spectrum imaging (SI), where a full spectrum is acquired and stored at each pixel in the image is becoming widespread. A challenge for the application of spectrum imaging is the processing of such large datasets in order to extract the significant information. When we go beyond the mapping of composition and look to map bonding and electronic structure this becomes both more important and more difficult. Approaches to processing spectrum imaging data sets acquired using electron energy loss spectroscopy (EELS) will be explored in this paper.

摘要

在电子显微镜中,诸如特征X射线或入射束能量损失等光谱信号可用于分析局部成分或电子结构。近年来,电子能谱仪的能量分辨率和灵敏度有所提高,从而提升了可获取光谱的质量。与此同时,用于模拟和解释光谱的计算方法也取得了重大进展。本文将简要回顾这些进展。近年来,分析电子显微镜的重点已从单光谱采集转向图谱绘制和成像。特别是,光谱成像(SI)的应用越来越广泛,即在图像的每个像素处采集并存储完整光谱。光谱成像应用面临的一个挑战是处理如此庞大的数据集以提取重要信息。当我们超越成分图谱绘制,转而绘制键合和电子结构图谱时,这一挑战变得更加重要且更加困难。本文将探讨处理使用电子能量损失谱(EELS)获取的光谱成像数据集的方法。

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