Qian Xiaoping, Villarrubia J S
Mechanical and Aerospace Engineering, Illinois Institute of Technology, Chicago, IL 60613, USA.
Ultramicroscopy. 2007 Dec;108(1):29-42. doi: 10.1016/j.ultramic.2007.02.031. Epub 2007 Mar 7.
The ability to image complex general three-dimensional (3D) structures, including reentrant surfaces and undercut features using scanning probe microscopy, is becoming increasing important in many small length-scale applications. This paper presents a dexel data representation and its algorithm implementation for scanning probe microscope (SPM) image simulation (morphological dilation) and surface reconstruction (erosion) on such general 3D structures. Validation using simulations, some of which are modeled upon actual atomic force microscope data, demonstrates that the dexel representation can efficiently simulate SPM imaging and reconstruct the sample surface from measured images, including those with reentrant surfaces and undercut features.
利用扫描探针显微镜对包括凹入表面和底切特征在内的复杂一般三维（3D）结构进行成像的能力，在许多小长度尺度应用中变得越来越重要。本文提出了一种体素数据表示及其算法实现，用于在这种一般3D结构上进行扫描探针显微镜（SPM）图像模拟（形态膨胀）和表面重建（侵蚀）。通过模拟进行验证，其中一些模拟是基于实际原子力显微镜数据建模的，结果表明体素表示可以有效地模拟SPM成像并从测量图像重建样品表面，包括那些具有凹入表面和底切特征的图像。
