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双轴可拉伸的“波浪形”硅纳米膜。

Biaxially stretchable "wavy" silicon nanomembranes.

作者信息

Choi Won Mook, Song Jizhou, Khang Dahl-Young, Jiang Hanqing, Huang Yonggang Y, Rogers John A

机构信息

Department of Materials Science and Engineering, Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, USA.

出版信息

Nano Lett. 2007 Jun;7(6):1655-63. doi: 10.1021/nl0706244. Epub 2007 May 8.

DOI:10.1021/nl0706244
PMID:17488053
Abstract

This Letter introduces a biaxially stretchable form of single crystalline silicon that consists of two dimensionally buckled, or "wavy", silicon nanomembranes on elastomeric supports. Fabrication procedures for these structures are described, and various aspects of their geometries and responses to uniaxial and biaxial strains along various directions are presented. Analytical models of the mechanics of these systems provide a framework for quantitatively understanding their behavior. These classes of materials might be interesting as a route to high-performance electronics with full, two-dimensional stretchability.

摘要

本信函介绍了一种双轴可拉伸的单晶硅形式,它由弹性体支撑上的二维弯曲或“波浪状”硅纳米膜组成。描述了这些结构的制造工艺,并展示了其几何形状的各个方面以及沿不同方向的单轴和双轴应变响应。这些系统力学的分析模型为定量理解其行为提供了一个框架。作为实现具有完全二维可拉伸性的高性能电子产品的途径,这类材料可能会很有趣。

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