Bahlawane N, Struckmeier U, Kasper T S, Osswald P
Physikalische Chemie I, Universität Bielefeld, Bielefeld, Germany.
Rev Sci Instrum. 2007 Jan;78(1):013905. doi: 10.1063/1.2426876.
Chemical vapor deposition (CVD) and metal-organic chemical vapor deposition (MOCVD) have been employed to develop alumina thin films in order to protect thermocouples from catalytic overheating in flames and to minimize the intrusion presented to the combustion process. Alumina films obtained with a CVD process using AlCl(3) as the precursor are dense, not contaminated, and crystallize in the corundum structure, while MOCVD using Al(acetyl acetone)(3) allows the growth of corundum alumina with improved growth rates. These films, however, present a porous columnar structure and show some carbon contamination. Therefore, coated thermocouples using AlCl(3)-CVD were judged more suitable for flame temperature measurements and were tested in different fuels over a typical range of stoichiometries. Coated thermocouples exhibit satisfactory measurement reproducibility, no temporal drifts, and do not suffer from catalytic effects. Furthermore, their increased radiative heat loss (observed by infrared spectroscopy) allows temperature measurements over a wider range when compared to uncoated thermocouples. A flame with a well-known temperature profile established with laser-based techniques was used to determine the radiative heat loss correction to account for the difference between the apparent temperature measured by the coated thermocouple and the true flame temperature. The validity of the correction term was confirmed with temperature profile measurements for several flames previously studied in different laboratories with laser-based techniques.
化学气相沉积(CVD)和金属有机化学气相沉积(MOCVD)已被用于制备氧化铝薄膜,以保护热电偶在火焰中免受催化过热影响,并尽量减少对燃烧过程的干扰。使用AlCl₃作为前驱体通过CVD工艺获得的氧化铝薄膜致密、无污染,并以刚玉结构结晶,而使用Al(乙酰丙酮)₃的MOCVD能够以更高的生长速率生长刚玉氧化铝。然而,这些薄膜呈现出多孔柱状结构并显示出一些碳污染。因此,使用AlCl₃ - CVD的涂层热电偶被认为更适合火焰温度测量,并在不同燃料的典型化学计量比范围内进行了测试。涂层热电偶具有令人满意的测量重现性,无时间漂移,且不受催化效应影响。此外,与未涂层的热电偶相比,它们增加的辐射热损失(通过红外光谱观察)使得能够在更宽的温度范围内进行温度测量。利用基于激光技术建立的具有已知温度分布的火焰来确定辐射热损失校正,以考虑涂层热电偶测量的表观温度与真实火焰温度之间的差异。通过对先前在不同实验室使用基于激光技术研究的几种火焰进行温度分布测量,证实了校正项的有效性。