Manzardo O, Herzig H P, Marxer C R, de Rooij N F
Opt Lett. 1999 Dec 1;24(23):1705-7. doi: 10.1364/ol.24.001705.
We present a miniaturized Fourier transform spectrometer (FTS) based on optical microelectromechanical system technology. The FTS is a Michelson interferometer with one scanning mirror. A new type of electrostatic comb drive actuator moves the mirror. We have measured a nonlinearity of the driving system of +/-0.5 mum for a displacement of 38.5 mum . A method is presented to correct the spectrum to get rid of the nonlinearity. The driving reproducibility is +/-25 nm. The measured resolution of the spectrometer after the phase correction is 6 nm at a wavelength of 633 nm.
我们展示了一种基于光学微机电系统技术的小型化傅里叶变换光谱仪（FTS）。该FTS是带有一个扫描镜的迈克尔逊干涉仪。一种新型的静电梳齿驱动致动器移动该镜。对于38.5μm的位移，我们测量到驱动系统的非线性为±0.5μm。提出了一种校正光谱以消除非线性的方法。驱动再现性为±25nm。在633nm波长下进行相位校正后，该光谱仪测得的分辨率为6nm。
