Irino T, Shirosaki Y, Shimizu Y
Tokyo Inst. of Technol.
IEEE Trans Ultrason Ferroelectr Freq Control. 1988;35(6):701-7. doi: 10.1109/58.9325.
Theoretical and experimental results on boundary acoustic waves propagated along a ZnO layer sandwiched between two materials are presented. It is shown that boundary acoustic waves can exist only when the material constants of the three materials satisfy the particular conditions obtained here. Experiments on SiO(2)/ZnO/SiO(2 ) were performed to verify the theoretical prediction of the existence of boundary waves. Boundary waves were excited and received by interdigital transducers and propagated along the ZnO layer. Propagation loss was practically the same as for Rayleigh waves, indicating a proper mode of the system. The results suggest that future SAW (surface acoustic wave) devices can be made without any package.
本文给出了沿夹在两种材料之间的ZnO层传播的边界声波的理论和实验结果。结果表明，只有当三种材料的材料常数满足此处得到的特定条件时，边界声波才会存在。对SiO(2)/ZnO/SiO(2)进行了实验，以验证边界波存在的理论预测。边界波由叉指换能器激发和接收，并沿ZnO层传播。传播损耗实际上与瑞利波相同，表明系统模式合适。结果表明，未来的声表面波（SAW）器件可以无需任何封装制造。
