Jellison G E
Solid State Division, Oak Ridge National Laboratory, Building 3025 MS 6030, PO Box 2008, Oak Ridge, Tennessee 37831-2008, USA.
Appl Opt. 1999 Aug 1;38(22):4784-9. doi: 10.1364/ao.38.004784.
The effect of windows or lenses placed between the polarization-state generator and the polarization-state detector in a general ellipsometry measurement is examined. It is found that three parameters are required for describing the effects of the window retardation on the ellipsometry measurements. Two of these window parameters can be measured at the same time as the sample parameters if the sample is isotropic, but the third window parameter cannot be determined independently and must be measured separately. If the sample is anisotropic, then none of the windows parameters can be measured independently at the same time as the sample parameters. An example is given in which the strain-induced retardation in fused-silica focusing lenses is measured with a two-modulator generalized ellipsometer and the results are used to correct the sample data.
研究了在一般椭圆偏振测量中，置于偏振态发生器和偏振态探测器之间的窗口或透镜的影响。结果发现，描述窗口延迟对椭圆偏振测量的影响需要三个参数。如果样品是各向同性的，其中两个窗口参数可以与样品参数同时测量，但第三个窗口参数不能独立确定，必须单独测量。如果样品是各向异性的，那么没有一个窗口参数可以与样品参数同时独立测量。给出了一个例子，其中用双调制广义椭圆偏振仪测量了熔融石英聚焦透镜中的应变诱导延迟，并将结果用于校正样品数据。
