Harasaki A, Wyant J C
Appl Opt. 2000 May 1;39(13):2101-6. doi: 10.1364/ao.39.002101.
An interference fringe modulation skewing effect in white-light vertical scanning interferometry that can produce a batwings artifact in a step height measurement is described. The skewing occurs at a position on or close to the edge of a step in the sample under measurement when the step height is less than the coherence length of the light source used. A diffraction model is used to explain the effect.
描述了一种在白光垂直扫描干涉测量法中出现的干涉条纹调制偏斜效应，该效应在台阶高度测量中会产生蝙蝠翼伪像。当被测样品中台阶高度小于所用光源的相干长度时，偏斜出现在被测台阶边缘上或靠近边缘的位置。采用衍射模型来解释这种效应。
