Cha S, Lin P C, Zhu L, Sun P C, Fainman Y
Department of Electrical and Computer Engineering, University of California, San Diego, La Jolla, California 92093-0407, USA.
Appl Opt. 2000 Jun 1;39(16):2605-13. doi: 10.1364/ao.39.002605.
A confocal microscope profilometer, which incorporates chromatic depth scanning with a diffractive optical element and a digital micromirror device for configurable transverse scanning, provides three-dimensional (3D) quantitative measurements without mechanical translation of either the sample or the microscope. We used a microscope with various objective lenses (e.g., 40x, 60x, and 100x) to achieve different system characteristics. With a 100x objective, the microscope acquires stable measurements over a 320 microm x 240 microm surface area with a depth resolution of 0.39 microm at a 3-Hz scan rate. The total longitudinal field of view is 26.4 microm for a wavelength tuning range of 48.3 nm. The FWHM value of the longitudinal point-spread function is measured to be 0.99 microm. We present 3D measurements of a four-phase-level diffractive element and an integrated-circuit chip. The resolution and the accuracy are shown to be equivalent to those found with use of conventional mechanical scanning.
一种共聚焦显微镜轮廓仪，它结合了利用衍射光学元件的色差深度扫描和用于可配置横向扫描的数字微镜器件，无需对样品或显微镜进行机械平移即可提供三维（3D）定量测量。我们使用了配备各种物镜（例如40倍、60倍和100倍）的显微镜来实现不同的系统特性。使用100倍物镜时，该显微镜在320微米×240微米的表面积上以3赫兹的扫描速率获得稳定测量结果，深度分辨率为0.39微米。对于48.3纳米的波长调谐范围，总纵向视野为26.4微米。纵向点扩散函数的半高宽值经测量为0.99微米。我们展示了一个四相位级衍射元件和一个集成电路芯片的3D测量结果。结果表明，其分辨率和精度与使用传统机械扫描时相当。
