Novel technology for controlled fabrication of aperture cantilever sensors for scanning near-field optical microscopy.

This paper presents a new technique for forming SNOM (Scanning Near-Field Optical Microscopy) cantilevers. The technique is based on the continuous growth of a conical hollow tip using local ion-induced carbon deposition on standard tipless cantilever chips. This method offers precise control of the geometric parameters of the cantilever's tip, including the angle of the tip, the probe's curvature radius, and the input and output aperture diameter. Such control allows to optimize the probe for specific tasks. The use of local structure methods based on FIB (Focused Ion Beam) enables the production of SNOM cantilevers with high radiation transmittance, tip robustness, and the capability to measure sample topography in semi-contact AFM (Atomic Force Microscopy) mode. The research focused on optimizing the technology for manufacturing tips with specific geometric characteristics, facilitating accurate navigation and positioning in the area of interest. The manufactured probe samples being tested demonstrate sufficient accuracy and mechanical durability of the tip. Overall, this technique offers a novel approach to forming SNOM cantilevers, providing precise control over geometric parameters and promising enhanced performance in various applications.