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溶胶-凝胶法制备的取向氧化锌薄膜的拉曼光谱研究

Raman study of oriented ZnO thin films deposited by sol-gel method.

作者信息

Yahia S Ben, Znaidi L, Kanaev A, Petitet J P

机构信息

Laboratoire d'Ingénierie des Matériaux et des Hautes Pressions, CNRS, UPR 1311, Université Paris 13, 99 Av. J.B. Clément, 93430 Villetaneuse, France.

出版信息

Spectrochim Acta A Mol Biomol Spectrosc. 2008 Dec 15;71(4):1234-8. doi: 10.1016/j.saa.2008.03.032. Epub 2008 Apr 1.

DOI:10.1016/j.saa.2008.03.032
PMID:18485809
Abstract

ZnO films with preferred orientation along the (0 0 2) plane were successfully deposited by the sol-gel method using Zn(CH3COO)2.2H2O as starting material and inorganic precursor. A homogeneous and stable solution was prepared by dissolving the zinc acetate in a solution of ethanol and monoethanolamine. Thin films are obtained by spin-coating on glass substrates. ZnO films were obtained by preheating the spin-coated films at 300 degrees C for 10 min after each coating and postheating upto 550 degrees C for 2h. The as-deposited films are transformed into mono-oriented ZnO upon thermal treatment. The films consist of spongy particles aggregates with an uniform size and homogenous surface. The films aim to be used in optoelectronic devices. Raman spectroscopy from ZnO films and deposit solutions has been investigated. New Raman results of the deposit solution suggest that Zn-O bond forms first in solution and that these entities play the role of germs initiating the crystallization mechanisms during films annealing. Raman spectra of the annealed films show the presence of a compressive stress within the film structure.

摘要

以Zn(CH3COO)2.2H2O作为起始原料和无机前驱体,采用溶胶-凝胶法成功制备了沿(0 0 2)面择优取向的ZnO薄膜。通过将醋酸锌溶解在乙醇和单乙醇胺的溶液中制备出均匀稳定的溶液。通过旋涂在玻璃基板上获得薄膜。每次涂覆后,将旋涂后的薄膜在300℃预热10分钟,然后后热至550℃保持2小时,从而获得ZnO薄膜。沉积后的薄膜经热处理转变为单取向ZnO。这些薄膜由尺寸均匀且表面均匀的海绵状颗粒聚集体组成。这些薄膜旨在用于光电器件。对ZnO薄膜和沉积溶液进行了拉曼光谱研究。沉积溶液的新拉曼结果表明,Zn-O键首先在溶液中形成,并且这些实体在薄膜退火过程中起到引发结晶机制的晶核作用。退火薄膜的拉曼光谱表明薄膜结构内存在压应力。

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