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基于偏心旋涂法的纳米线定制单轴排列用于柔性透明场效应晶体管

Tailored Uniaxial Alignment of Nanowires Based on Off-Center Spin-Coating for Flexible and Transparent Field-Effect Transistors.

作者信息

Lee Giwon, Kim Haena, Lee Seon Baek, Kim Daegun, Lee Eunho, Lee Seong Kyu, Lee Seung Goo

机构信息

Department of Chemical Engineering, Pohang University of Science and Technology, Pohang 37673, Korea.

Department of Chemical Engineering, Kumoh National Institute of Technology, Gumi 39177, Korea.

出版信息

Nanomaterials (Basel). 2022 Mar 28;12(7):1116. doi: 10.3390/nano12071116.

Abstract

The alignment of nanowires (NWs) has been actively pursued for the production of electrical devices with high-operating performances. Among the generally available alignment processes, spin-coating is the simplest and fastest method for uniformly patterning the NWs. During spinning, the morphology of the aligned NWs is sensitively influenced by the resultant external drag and inertial forces. Herein, the assembly of highly and uniaxially aligned silicon nanowires (Si NWs) is achieved by introducing an off-center spin-coating method in which the applied external forces are modulated by positioning the target substrate away from the center of rotation. In addition, various influencing factors, such as the type of solvent, the spin acceleration time, the distance between the substrate and the center of rotation, and the surface energy of the substrate, are adjusted in order to optimize the alignment of the NWs. Next, a field-effect transistor (FET) incorporating the highly aligned Si NWs exhibits a high effective mobility of up to 85.7 cm V s, and an on-current of 0.58 µA. Finally, the single device is enlarged and developed in order to obtain an ultrathin and flexible Si NW FET array. The resulting device has the potential to be widely expanded into applications such as wearable electronics and robotic systems.

摘要

为了生产具有高操作性能的电子器件,人们一直在积极探索纳米线(NWs)的排列方式。在通常可用的排列工艺中,旋涂是使纳米线均匀图案化的最简单、最快的方法。在旋转过程中,排列好的纳米线的形态会受到产生的外部阻力和惯性力的敏感影响。在此,通过引入一种偏心旋涂方法实现了高度单轴排列的硅纳米线(Si NWs)的组装,其中通过将目标基板放置在远离旋转中心的位置来调节施加的外力。此外,还对各种影响因素进行了调整,如溶剂类型、自旋加速时间、基板与旋转中心之间的距离以及基板的表面能,以优化纳米线的排列。接下来,包含高度排列的Si NWs的场效应晶体管(FET)表现出高达85.7 cm² V⁻¹ s⁻¹的高有效迁移率和0.58 μA的导通电流。最后,对单个器件进行放大和开发,以获得超薄且柔性的Si NW FET阵列。所得器件有潜力广泛应用于可穿戴电子设备和机器人系统等领域。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f603/9000857/c089650604f0/nanomaterials-12-01116-g001.jpg

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