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具有氮化镓微透镜阵列的氮化镓基发光二极管的方位各向同性辐照度。

Azimuthally isotropic irradiance of GaN-based light-emitting diodes with GaN microlens arrays.

作者信息

Wu Mount-Learn, Lee Yun-Chih, Yang Shih-Pu, Lee Po-Shen, Chang Jenq-Yang

机构信息

Department of Optics and Photonics, National Central University, Jhongli, Taiwan 32054, ROC.

出版信息

Opt Express. 2009 Apr 13;17(8):6148-55. doi: 10.1364/oe.17.006148.

Abstract

In this paper, the irradiance-modifying concept is proposed by introducing a microlens array on the p-GaN layer of GaN-based light-emitting diode (LED). Every microlens can locally modulate photons emitting from a micro-scaled active region of multiple quantum wells (MQWs) just beneath the microlens. The azimuthally isotropic irradiance from the GaN-based LED with microlens arrays is demonstrated numerically and experimentally. To realize such a novel LED, one-dimensional GaN microlens array with a period of 1.6 microm and a filling factor of 0.64 are fabricated by using dry etching. According to experimental results, the azimuthally isotropic light emission of proposed LED is observed. By using the angular-resolved photoluminescence, its intensity variation corresponding to the azimuth angles is as low as 10% within the angle region of +/-50 degrees.

摘要

在本文中,通过在基于氮化镓(GaN)的发光二极管(LED)的p-GaN层上引入微透镜阵列,提出了辐照度调制概念。每个微透镜都可以局部调制从其下方多量子阱(MQW)的微尺度有源区发射的光子。通过数值和实验证明了具有微透镜阵列的基于GaN的LED的方位角各向同性辐照度。为了实现这种新型LED,采用干法刻蚀制备了周期为1.6微米、填充因子为0.64的一维GaN微透镜阵列。根据实验结果,观察到了所提出LED的方位角各向同性发光。通过角分辨光致发光,在±50度的角度区域内,其对应方位角的强度变化低至10%。

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