Jokerst Nan, Royal Matthew, Palit Sabarni, Luan Lin, Dhar Sulochana, Tyler Talmage
Department of Electrical and Computer Engineering, Duke University, Durham, NC 27708-0291, USA.
J Biophotonics. 2009 Apr;2(4):212-26. doi: 10.1002/jbio.200910010.
Medicine, environmental monitoring, and security are application areas for miniaturized, portable sensing systems. The emerging integration of sensors with other components (electronic, photonic, fluidic) is moving sensing toward higher levels of portability through the realization of self-contained chip scale sensing systems. Planar optical sensors, and in particular, microresonator sensors, are attractive components for chip scale integrated sensing systems because they are small, have high sensitivity, can be surface customized, and can be integrated singly or in arrays in a planar format with other components using conventional semiconductor fabrication technologies. This paper will focus on the progress and prospects for the integration of microresonator sensors at the chip scale with photonic input/output components and with sample preparation microfluidics, toward self-contained, portable sensing systems.
医学、环境监测和安全领域是小型化便携式传感系统的应用领域。随着传感器与其他组件（电子、光子、流体）的新兴集成，通过实现独立的芯片级传感系统，传感正朝着更高的便携性水平发展。平面光学传感器，尤其是微谐振器传感器，是芯片级集成传感系统的有吸引力的组件，因为它们体积小、灵敏度高、可进行表面定制，并且可以使用传统半导体制造技术以平面形式单独或成阵列地与其他组件集成。本文将重点关注芯片级微谐振器传感器与光子输入/输出组件以及样品制备微流体集成，以实现独立、便携式传感系统的进展和前景。
