Zhang Xiaohua, Lacerda Silvia H De Paoli, Yager Kevin G, Berry Brian C, Douglas Jack F, Jones Ronald L, Karim Alamgir
Polymers Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA.
ACS Nano. 2009 Aug 25;3(8):2115-20. doi: 10.1021/nn9002133.
It is well-known that thin films of cylinder-forming block copolymers (BCP) can exhibit a transition from a perpendicular to a parallel cylinder orientation with respect to the supporting solid substrate upon varying film thickness. We show that wave-like oscillations between these morphologies can be induced through the introduction of nanoparticles (NP) into flow-coated and annealed BCP films where the particles span the film thickness and are fixed by irreversible adsorption to the supporting substrate. We hypothesize that these novel "target" patterns arise from residual stresses that build up in the film while undergoing thermal treatment and film formation, and we support this hypothesis by showing the suppression of this type of pattern formation in films that are first thermally annealed near their glass transition T(g) to relax residual stress. Similar undulating height patterns are also observed in heated homopolymer films with nanoparticles, consistent with our thermally induced stress hypothesis of the target pattern formation in BCP films and pointing to the general nature of wave-like thermally induced height variations in heated heterogeneous polymer films. Similar wave patterns should be induced by lithographically etched substrate patterns arising in device fabrication using BCP materials, which makes the phenomena of technological interest. These target patterns also potentially provide valuable information about the presence of residual stresses in cast films that arise during their processing.
众所周知,形成圆柱体的嵌段共聚物(BCP)薄膜在改变薄膜厚度时,相对于支撑固体基板可呈现从垂直圆柱体取向到平行圆柱体取向的转变。我们表明,通过将纳米颗粒(NP)引入流延涂布并退火的BCP薄膜中,可以诱导这些形态之间的波状振荡,其中颗粒跨越薄膜厚度并通过不可逆吸附固定在支撑基板上。我们推测,这些新颖的“目标”图案源于薄膜在热处理和成膜过程中积累的残余应力,并且我们通过展示在其玻璃化转变温度T(g)附近首先进行热退火以松弛残余应力的薄膜中这种类型图案形成的抑制来支持这一假设。在含有纳米颗粒的加热均聚物薄膜中也观察到类似的起伏高度图案,这与我们关于BCP薄膜中目标图案形成的热诱导应力假设一致,并表明加热的非均相聚合物薄膜中波状热诱导高度变化的普遍性质。在使用BCP材料的器件制造中出现的光刻蚀刻基板图案也应会诱导类似的波图案,这使得这些现象具有技术意义。这些目标图案还可能提供有关流延薄膜在加工过程中产生的残余应力存在的有价值信息。