范德堡法用于测量具有远距离边界的平面样品的电阻率。

van der Pauw method for measuring resistivity of a plane sample with distant boundaries.

作者信息

Lim S H N, McKenzie D R, Bilek M M M

机构信息

Applied and Plasma Physics, School of Physics (A28), University of Sydney, Sydney, 2006 New South Wales, Australia.

出版信息

Rev Sci Instrum. 2009 Jul;80(7):075109. doi: 10.1063/1.3183503.

DOI:10.1063/1.3183503

PMID:19655983

Abstract

In the paper, we derive an algorithm which follows from the original van der Pauw's technique for measuring resistivity with the added advantage of allowing contacts to be positioned a distance away from the boundary. For a large sample area, we show that the resistivity calculated by our algorithm is equivalent to the resistivity calculated by the original van der Pauw's method. In practice, this configuration is easier to achieve and can eliminate errors associated with contacts that are not placed exactly at the edge.

摘要

在本文中，我们推导了一种算法，该算法源自最初的范德堡测量电阻率的技术，其额外的优点是允许将接触点放置在离边界一定距离处。对于较大的样本区域，我们表明通过我们的算法计算出的电阻率与通过原始范德堡方法计算出的电阻率相等。在实际应用中，这种配置更容易实现，并且可以消除与未精确放置在边缘的接触点相关的误差。