Shivaraman Shriram, Barton Robert A, Yu Xun, Alden Jonathan, Herman Lihong, Chandrashekhar Mvs, Park Jiwoong, McEuen Paul L, Parpia Jeevak M, Craighead Harold G, Spencer Michael G
Cornell Center for Materials Research, Cornell University, Ithaca, New York 14853, USA.
Nano Lett. 2009 Sep;9(9):3100-5. doi: 10.1021/nl900479g.
We report on a method to produce free-standing graphene sheets from epitaxial graphene on silicon carbide (SiC) substrate. Doubly clamped nanomechanical resonators with lengths up to 20 microm were patterned using this technique and their resonant motion was actuated and detected optically. Resonance frequencies of the order of tens of megahertz were measured for most devices, indicating that the resonators are much stiffer than expected for beams under no tension. Raman spectroscopy suggests that the graphene is not chemically modified during the release of the devices, demonstrating that the technique is a robust means of fabricating large-area suspended graphene structures.
我们报道了一种从碳化硅(SiC)衬底上的外延石墨烯制备独立石墨烯片的方法。使用该技术对长度达20微米的双端夹紧纳米机械谐振器进行了图案化,并通过光学手段驱动和检测其谐振运动。大多数器件测得的谐振频率为几十兆赫兹量级,这表明谐振器比无张力梁预期的要硬得多。拉曼光谱表明,在器件释放过程中石墨烯没有发生化学改性,这证明该技术是制造大面积悬浮石墨烯结构的可靠方法。