Zach J
CEOS GmbH, Englerstr. 28, 69126 Heidelberg, Germany.
Philos Trans A Math Phys Eng Sci. 2009 Sep 28;367(1903):3699-707. doi: 10.1098/rsta.2009.0125.
When the development of correctors started in the 1970s, chromatic correction was already the main goal. The first corrector that could improve the resolution of an electron microscope was a chromatic corrector for a scanning electron microscope. Within the last three decades, the development of transmission electron microscopes (TEMs) was to a large extent driven by the attempt to improve the resolution in the presence of chromatic aberration. The major technical developments were high acceleration voltages, highly excited objective lenses with short focal length and field emission guns. Meanwhile, chromatic correction has reached the TEM world. Now, the question arises as to whether chromatic correction will make some of the aforementioned developments obsolete for high-resolution TEM, thereby opening up new imaging possibilities, which are nowadays prevented by instrument constraints. We show some examples for a 0.1 nm resolution TEM with unconventional microscope designs: very low voltages, far-field objective lenses and inexpensive electron guns.
20世纪70年代校正器开始发展时，色差校正就已成为主要目标。第一台能够提高电子显微镜分辨率的校正器是用于扫描电子显微镜的色差校正器。在过去三十年中，透射电子显微镜（TEM）的发展在很大程度上受到在存在色差的情况下提高分辨率这一尝试的推动。主要技术发展包括高加速电压、具有短焦距的高激发物镜和场发射枪。与此同时，色差校正已进入透射电子显微镜领域。现在，问题出现了，即色差校正是否会使上述一些高分辨率透射电子显微镜的发展过时，从而开辟新的成像可能性，而这些可能性目前因仪器限制而无法实现。我们展示了一些具有非常规显微镜设计的0.1纳米分辨率透射电子显微镜的示例：极低电压、远场物镜和廉价电子枪。
