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使用异丙醇钛(TIPOT)在不同流速下沉积的类金刚石碳(DLC)薄膜的表征。

Characterisation of DLC films deposited using titanium isopropoxide (TIPOT) at different flow rates.

作者信息

Said R, Ali N, Ghumman C A A, Teodoro O M N D, Ahmed W

机构信息

School of Computing, Engineering and Physical Sciences, University of Central Lancashire, Preston PR1 2HE, UK.

出版信息

J Nanosci Nanotechnol. 2009 Jul;9(7):4298-304. doi: 10.1166/jnn.2009.m49.

Abstract

In recent years, there has been growing interest in the search for advanced biomaterials for biomedical applications, such as human implants and surgical cutting tools. It is known that both carbon and titanium exhibit good biocompatibility and have been used as implants in the human body. It is highly desirable to deposit biocompatible thin films onto a range of components in order to impart biocompatibility and to minimise wear in implants. Diamond like carbon (DLC) is a good candidate material for achieving biocompatibility and low wear rates. In this study, thin films of diamond-like-carbon DLC were deposited onto stainless steel (316) substrates using C2H2, argon and titanium isopropoxide (TIPOT) precursors. Argon was used to generate the plasma in the plasma enhanced vapour deposition (PECVD) system. A critical coating feature governing the performance of the component during service is film thickness. The as-grown films were in the thickness range 90-100 nm and were found to be dependent on TIPOT flow rate. Atomic force microscopy (AFM) was used to characterise the surface roughness of the samples. As the flow rate of TIPOT increased the average roughness was found to increase in conjunction with the film thickness. Raman spectroscopy was used to investigate the chemical structure of amorphous carbon matrix. Surface tension values were calculated using contact angle measurements. In general, the trend of the surface tension results exhibited an opposite trend to that of the contact angle. The elemental composition of the samples was characterised using a VG ToF SIMS (IX23LS) instrument and X-ray photoelectron spectroscopy (XPS). Surprisingly, SIMS and XPS results showed that the DLC samples did not show evidence of titanium since no peaks representing to titanium appeared on the SIMS/XPS spectra.

摘要

近年来,人们对寻找用于生物医学应用的先进生物材料的兴趣日益浓厚,这些应用包括人体植入物和手术切割工具。众所周知,碳和钛都具有良好的生物相容性,并且已被用作人体植入物。非常希望在一系列部件上沉积生物相容性薄膜,以赋予生物相容性并使植入物的磨损最小化。类金刚石碳(DLC)是实现生物相容性和低磨损率的良好候选材料。在本研究中,使用C2H2、氩气和异丙醇钛(TIPOT)前驱体将类金刚石碳DLC薄膜沉积在不锈钢(316)基板上。氩气用于在等离子体增强气相沉积(PECVD)系统中产生等离子体。决定部件在使用过程中性能的一个关键涂层特性是薄膜厚度。生长的薄膜厚度在90-100nm范围内,并且发现其取决于TIPOT流速。原子力显微镜(AFM)用于表征样品的表面粗糙度。随着TIPOT流速的增加,发现平均粗糙度随着薄膜厚度的增加而增加。拉曼光谱用于研究非晶碳基体的化学结构。使用接触角测量计算表面张力值。一般来说,表面张力结果的趋势与接触角的趋势相反。使用VG ToF SIMS(IX23LS)仪器和X射线光电子能谱(XPS)对样品的元素组成进行表征。令人惊讶的是,SIMS和XPS结果表明,DLC样品没有显示出钛的迹象,因为在SIMS/XPS光谱上没有出现代表钛的峰。

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