Miyake Syugo, Kita Takashi, Miyake Aya, Ikeda Ken-ichi, Takamatsu Hiroyuki
Department of Electrical and Electronics Engineering, Graduate School of Engineering, Kobe University, Rokkodai 1-1, Nada, Kobe 657-8501, Japan.
Rev Sci Instrum. 2009 Dec;80(12):124901. doi: 10.1063/1.3265994.
The temperature response of the thermal conductivity (lambda) of metal thin films has been investigated by the thermoreflectance (TR) method. The phase lag of the TR signals depends on the thermal diffusivity when the heating area is small, while on the thermal effusivity when the heating area is large. This enables us to evaluate lambda by analyzing the three-dimensional thermal propagation in the film on the substrate. We show that by analyzing the TR signals, lambda of Cu-Pt alloy thin films formed on glass substrates can be estimated. The estimated lambda drastically decreases with an increase in the Pt concentration. Furthermore, we discuss these results by considering the crystallographic properties of the abovementioned thin films investigated by transmission electron microscopy and x-ray diffraction.
通过热反射（TR）方法研究了金属薄膜热导率（λ）的温度响应。当加热面积较小时，TR信号的相位滞后取决于热扩散率；而当加热面积较大时，取决于热发射率。这使我们能够通过分析薄膜在衬底上的三维热传播来评估λ。我们表明，通过分析TR信号，可以估算在玻璃衬底上形成的Cu-Pt合金薄膜的λ。估算出的λ随着Pt浓度的增加而急剧下降。此外，我们通过考虑用透射电子显微镜和X射线衍射研究的上述薄膜的晶体学性质来讨论这些结果。
