Burge R E, Davidson A T, Draper J C, Field G R, Murphy E
Appl Opt. 1971 Feb 1;10(2):342-5. doi: 10.1364/AO.10.000342.
A focusing reflectometer for measuring the optical constants of thin films by the (Rø) method is described. The focusing reflectometer has a larger effective aperture than typical planar reflectometers, and, unlike planar reflectometers, the illuminated area of the specimen is independent of the angle of incidence. The intensity of the incident light is not measured so the reflectometer is limited to wavelengths where the reflectivity of the specimen varies rapidly with the angle of incidence. Results are given for evaporated gold films in the energy range 6.0 eV to 12.0 eV.
描述了一种用于通过（Rø）方法测量薄膜光学常数的聚焦反射仪。该聚焦反射仪具有比典型平面反射仪更大的有效孔径，并且与平面反射仪不同，样品的照明区域与入射角无关。由于不测量入射光的强度，所以该反射仪仅限于样品反射率随入射角快速变化的波长范围。给出了在6.0电子伏特至12.0电子伏特能量范围内蒸发金膜的测量结果。
