Hunter W R, Mikes T L, Hass G
Appl Opt. 1972 Jul 1;11(7):1594-7. doi: 10.1364/AO.11.001594.
Gold diffraction gratings overcoated with Al + MgF(2) to increase their efficiency in the vacuum ultraviolet suffered a severe loss in efficiency within six months to a year after coating; for example, from 50% to 2% at lambda1216 A. The cause of this loss was assumed to be interdiffusion of Au and Al; therefore, a more complete study of Au-Al film combinations was performed. The coatings were aged at room and elevated temperatures. Reflectance measurements were made in the visible and vacuum ultraviolet spectral regions. For wavelengths longer than lambda900 A, the measurements show very little change until the diffusion boundary reaches the penetration depth of the radiation. If Al is the first surface layer, however, reflectance measurements at lambda584 A permit measuring the progress of the diffusion boundary toward the Al surface because of the low absorptance of Al at this wavelength. Interdiffusion can be effectively eliminated by the use of thin dielectric layers uch as SiO and the natural oxide of Al. Such protected coatings have been exposed for one week at a temperature of 170 degrees C with no visible sign of diffusion, whereas a similar coating without the barrier layer would become useless in less than 1 h. Some preliminary studies have been made with Pt-Al film combinations.
涂覆有Al + MgF₂以提高其在真空紫外光下效率的金衍射光栅,在涂覆后的六个月到一年内效率严重下降;例如,在λ1216 Å处从50%降至2%。这种效率损失的原因被认为是金和铝的相互扩散;因此,对金 - 铝薄膜组合进行了更全面的研究。涂层在室温和高温下老化。在可见光和真空紫外光谱区域进行反射率测量。对于波长大于λ900 Å的情况,测量结果显示直到扩散边界达到辐射的穿透深度之前变化很小。然而,如果铝是第一表面层,由于铝在该波长下的低吸收率,在λ584 Å处的反射率测量可以测量扩散边界向铝表面的推进情况。通过使用诸如SiO和铝的天然氧化物等薄介电层可以有效消除相互扩散。这种受保护的涂层在170摄氏度的温度下暴露一周没有可见的扩散迹象,而没有阻挡层的类似涂层在不到1小时内就会失效。已经对铂 - 铝薄膜组合进行了一些初步研究。