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晶圆级外延石墨烯的 100GHz 晶体管。

100-GHz transistors from wafer-scale epitaxial graphene.

机构信息

IBM T. J. Watson Research Center, Yorktown Heights, NY 10598, USA.

出版信息

Science. 2010 Feb 5;327(5966):662. doi: 10.1126/science.1184289.

Abstract

The high carrier mobility of graphene has been exploited in field-effect transistors that operate at high frequencies. Transistors were fabricated on epitaxial graphene synthesized on the silicon face of a silicon carbide wafer, achieving a cutoff frequency of 100 gigahertz for a gate length of 240 nanometers. The high-frequency performance of these epitaxial graphene transistors exceeds that of state-of-the-art silicon transistors of the same gate length.

摘要

石墨烯的高载流子迁移率已被用于高频工作的场效应晶体管。晶体管是在碳化硅晶圆的硅面合成的外延石墨烯上制造的,栅长为 240 纳米时,截止频率达到 100 吉赫兹。这些外延石墨烯晶体管的高频性能超过了相同栅长的最先进的硅晶体管。

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