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双光束双通道波长调制反射仪。

Double-beam two-channel wavelength-modulated reflectometer.

作者信息

Kardux W, Krusemeyer H J

出版信息

Appl Opt. 1974 Nov 1;13(11):2704-11. doi: 10.1364/AO.13.002704.

Abstract

A double-beam wavelength-modulated reflectometer utilizing a single detector and without a reflectivity reference has been described. Separate electronic channels are used for the two wavelengths at which the reflectometer alternatively operates. The gain of one of the channels is controlled by feedback to eliminate the instrumental background. The derivative and conventional reflectivity are measured simultaneously. The influence of the photomultiplier dark current and scattered light on the accuracy and of some design parameters on the SNR have been evaluated. The system has been checked by measuring the derivative and conventional reflectivity spectrum of GaAs.

摘要

描述了一种利用单个探测器且无反射率参考的双光束波长调制反射计。该反射计交替工作的两个波长使用单独的电子通道。其中一个通道的增益通过反馈进行控制以消除仪器背景。同时测量导数反射率和常规反射率。评估了光电倍增管暗电流和散射光对精度的影响以及一些设计参数对信噪比的影响。通过测量砷化镓的导数反射率谱和常规反射率谱对该系统进行了检验。

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