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温度控制的蘸笔纳米光刻技术。

Temperature controlled dip-pen nanolithography.

机构信息

NanoInk Incorporation, 8025 Lamon Avenue, Skokie, IL 60077, USA.

出版信息

Nanotechnology. 2010 Mar 19;21(11):115302. doi: 10.1088/0957-4484/21/11/115302. Epub 2010 Feb 22.

Abstract

Dip-pen nanolithography (DPN) has emerged as a powerful tool for creating sophisticated micron- and nanoscale features of various molecules, such as small organic molecules, on a variety of substrates. Despite significant advances in recent years, the influence of temperature on molecular transport for nanostructure fabrication has not been fully explored. Herein, it is shown how the dimensions of patterned organic nanostructures can be controlled by using a cooling/heating module. This method allows nanometer-sized feature fabrication of a variety of small organic molecules, including 'inks' that have been deemed very difficult to write under ambient conditions. Features with dimensions as small as 30 nm have been successfully reproduced using the newly developed temperature control device in conjunction with DPN.

摘要

蘸笔纳米光刻(DPN)已成为在各种基底上创建各种分子的复杂微米和纳米级特征(如小分子有机分子)的强大工具。尽管近年来取得了重大进展,但温度对纳米结构制造中分子传输的影响尚未得到充分探索。本文展示了如何使用冷却/加热模块来控制图案有机纳米结构的尺寸。该方法允许对各种小分子进行纳米级特征的制造,包括在环境条件下被认为很难书写的“墨水”。使用新开发的温度控制装置与 DPN 相结合,可以成功复制尺寸小至 30nm 的特征。

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